FEI Nova Nanolab 200
The Nova Nanolab is a state-of-the-art Dual-Beam workstation with a FEG Scanning Electron Microscope and a Focused Ion Beam, which is easy to operate, and is especially suitable for multi-user and multi-discipline environments. The station is fitted with an Ominiprobe micromanipulator in complement to Platinum, Oxide deposition capabilities, broadening widening its fields of applications from HR-SEM to TEM sample preparation to failure analysis of semiconductor devices.
Ions: 5 to 30kV
Bruker XFlash 5010
2.5nm @1kV
Applications