FEI Nova Nanolab 200
FEI Nova Nanolab 200 Dual-Beam Workstation
The Nova Nanolab is a state-of-the-art Dual-Beam workstation with a FEG Scanning Electron Microscope and a Focused Ion Beam, which is easy to operate, and is especially suitable for multi-user and multi-discipline environments. The station is fitted with an Ominiprobe micromanipulator in complement to Platinum, Oxide deposition capabilities, broadening widening its fields of applications from HR-SEM to TEM sample preparation to failure analysis of semiconductor devices.
ZnO Nanowires on Si substrate (top view)
Ga droplets formation on (001) Ga surface after Ga ion beam irradiation.
Applications
FIB, SEM, EDX
Accelerating Voltage
Electrons:200V to 30kV
Ions: 5 to 30kV
Ions: 5 to 30kV
Electron Filament
Schottky Field Emitter, Sirion Type
Detectors
In-Lens SE and BSE Detector
Bruker XFlash 5010
Bruker XFlash 5010
SEM Resolution
1.0 nm @ 15kV
2.5nm @1kV
2.5nm @1kV
Ion Optics
MagnumTM Liquid Gallim Ion Emitter
Ion Resolution
15 nm @ 30kV @ 1pA
Gas Injectors
Platinum, Oxyde
Plucker
Omniprobe 100.7
Applications
HRSEM image of nanometer-size gold particles