AFM Dimension 3000
AFM Dimension 3000
Vecco Dimension 3100 Atomic Force Microscope
The Dimension 3100 AFM is an instrument capable of scanning surfaces with sub-Angstrom vertical resolution, resulting in high-resolution topographic images. The instrument works by measuring the deflection of a beam produced by the displacement of a sharp tip residing at the free end of a micro-fabricated cantilever. Samples that can be analyzed by the instrument can be as large as 150 mm diameter wafers.
AFM scan of Si face SiC.
Note the facets due the miscut.